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Modeling and optimization of atomic layer deposition processes on vertically aligned carbon nanotubes

Authors

N. Yazdani

V. Chawla

E. Edwards

V. Wood

H. G. Park*

I. Utke*

DOI

https://doi.org/10.3762/bjnano.5.25

Description

5(1), pp. 234–244

Journal

Beilstein Journal of Nanotechnology

PDF

2190-4286-5-25.pdf

Year

2014